Plasma-Therm's control software implements numerous productivity enhancement
features, including real-time graphical representation and
logging of process data, factory connectivity, and automated system cleans. Optional
process-control and data-visualization software can be easily integrated with most
EndpointWorks® is a modular, highly flexible endpoint detection system that utilizes
multiple inputs to determine process endpoint. With the appropriate sensors, EndpointWorks®
can detect endpoint based on laser interferometry, reflectance, optical emission spectroscopy
(OES), optical emission interferometry (OEI), RF parameter monitoring, or nearly any
other available endpoint technique. EndpointWorks® also features a wide array of
user-friendly tools to assist in the analysis of historical data and optimization of
new recipes. The modular nature of EndpointWorks® means that new endpoint techniques
can be rapidly integrated with existing systems and put into production.
Data logging and charting
Cortex® control software offers comprehensive data logging and charting functions.
Data can be displayed in tabular format, and charts can be created from real-time data
and process data saved on disk. Parameter data and multi-parameter charts can viewed
within Cortex® also can also be exported for use in other programs.
Automated maintenance functions in Plasma-Therm's control software can help improve
system efficiency and reduce unexpected down-time.
With Automated Clean and Prep (ACAP) in Cortex®, plasma conditioning and cleaning
routines can be set to run according to a variety of triggers, including the number of
jobs or wafers that have been run, total RF-on time, and accumulated film thickness.
Recipes can also be tagged and the tags incorporated into ACAP rules, such as running
a prep recipe when a tag changes, and resetting counters whenever a recipe tagged "Clean"
is run either automatically or by an operator.
GLANCE™ is a comprehensive data-logging and visualization tool included with
all Plasma-Therm systems. GLANCE collects and stores data from one process chamber or
an entire fleet of tools in a centralized database. Multiple users can simultaneously
run Glance, using any device — desktops, laptops, and tablets — to examine
and chart process data. You can chart multiple parameters from one process run, and compare
a parameter across multiple runs. GLANCE™ also allows comparison of recipes and
can highlight differences in recipe parameters. And GLANCE™ works with the live
database and with exported datasets, so engineers can review events, alarms, process
parameters and recipes at any time, anywhere.
Plasma-Therm offers a factory automation interface that conforms to SEMI SECS/GEM
standards. Licensed separately, the automation interface allows factory automation host
systems to communicate with Plasma-Therm tools for actions such as downloading recipes,
defining jobs, and responding to events and alarms.