KOBUS is proud to announce its participation at the MAM2017 conference.
The latest information concerning the F.A.S.T® technology applied to TSVs will be presented.
Part of the talk will introduce new results on the SiO2 liner deposition, while a second part will focus on the TiN barrier layer.
Pros and cons of the (PE)CVD, (PE)ALD and FAST solutions, all available with a FAST deposition module, will be compared and applied to different aspect ratio vias.
Full abstract of the talk can be found here.
The Materials for Advanced Metallization conference will take place in Dresden, Germany, March 26-29th
EUROPEAN 3D Summit 2017
Jan 23-25, 2017
will be glad to meet you at the European 3D Summit, on our booth #20
Just before Christmas, we are proud to help EMIL team from HZB to play with a nice toy…
See how an industrial tool can be connected to the most advanced characterization system.
If you want to find out more about us and where we come from, read what the “Queen of 3D”, Françoise Von Trapp has to say.
Find the full article on 3Dincites.