KOBUS is proud to announce its participation at the MAM2017 conference.
The latest information concerning the F.A.S.T® technology applied to TSVs will be presented.
Part of the talk will introduce new results on the SiO2 liner deposition, while a second part will focus on the TiN barrier layer.
Pros and cons of the (PE)CVD, (PE)ALD and FAST solutions, all available with a FAST deposition module, will be compared and applied to different aspect ratio vias.
Full abstract of the talk can be found here.
The Materials for Advanced Metallization conference will take place in Dresden, Germany, March 26-29th