About Us

KOBUS develops highly efficient cost effective CVD technologies used for R&D, pilot and manufacturing of semiconductor, LEDs, MEMS and photovoltaic devices.

KOBUS has developped a unique deposition method at the crossroads of ALD and CVD: F.A.S.T. for Fast Atomic Sequential Technology.

Quality

KOBUS is ISO 9001 certified.


Global Expertise

HARDWARE l PROCESS l SOFTWARE l SERVICE

  • Application lab support
  • Installation
  • Training and documentation
  • Spare parts and service programs

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